Thursday, May 1, 2008
| Handbook of Silicon Semiconductor Metrology 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, http://mihd.net/denhsq http://rapidshare.com/files/49245481/0824705068.rar |
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